Its main working process is:
①By the air conditioning processor to the air (fresh air) processed into the required state point sent to the static pressure box and the return air mix, and then after the filter fan unit fan pressurized by a high-efficiency filter (HEPA) or ultra-high-efficiency air filters (ULPA) filtered into the clean room;
②the original old air through the raised floor or sidewall delivery back to the dry coils, in the dry coils in the cold (hot) treatment, and then by the back to the pressurized machine sent back to the static pressure box, this completes the process.
③After cold (hot) treatment in the dry coil, it is sent back to the static pressure box by the return press, which completes the whole cycle of air filtration in the clean room.
Such a system is most often used in places where there is a need for ultra-quiet clean rooms, such as clean rooms for making large integrated circuit wafers, TFT displays, solid state hard disks, and so on.
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This time we introduce the terminology used in semiconductor applications:
CUP Central Utility Plant
OWW Organic Waste Water
DAHW Drain Amonia Hydride Waste
PAW Phosphoric Acid Waste water
VMB Valve Manifold Box